%0 Journal Article %K Electricity %K Film %K Perovskite %K Silicon %K Thickness %K Metal oxide %K Polarization %K Ferroelectricity %K Fluoride %K Fluorite %K Hafnium %K Hafnium oxide %K Unclassified drug %K Electric field %K Superconductivity %K Symmetry %K Article %K Chemical parameters %K Chemical structure %K Controlled study %K Electrical parameters %K Photon %K Priority journal %K Reverse size effect %A S.S Cheema %A D Kwon %A N Shanker %A R. dos Reis %A S.-L Hsu %A J Xiao %A H Zhang %A R Wagner %A A Datar %A M.R McCarter %A C.R Serrao %A A.K Yadav %A G Karbasian %A C.-H Hsu %A A.J Tan %A L.-C Wang %A V Thakare %A X Zhang %A A Mehta %A E Karapetrova %A R.V Chopdekar %A P Shafer %A E Arenholz %A C Hu %A R Proksch %A Ramamoorthy Ramesh %A J Ciston %A S Salahuddin %B Nature %D 2020 %G eng %I Nature Research %P 478-482 %R 10.1038/s41586-020-2208-x %T Enhanced ferroelectricity in ultrathin films grown directly on silicon %V 580