%0 Conference Paper %K Cooling %K Thin films %K Superlattices %K Heat flux %A Ihtesham Chowdhury %A Ravi S Prasher %A Kelly Lofgreen %A Sridhar Narasimhan %A Ravi Mahajan %A David Koester %A Rama Venkatasubramanian %B ASME 2009 InterPACK Conference collocated with the ASME 2009 Summer Heat Transfer Conference and the ASME 2009 3rd International Conference on Energy Sustainability %D 2009 %G eng %I American Society of Mechanical Engineers %P 521–526 %R 10.1115/InterPACK2009-89268 %S ASME 2009 InterPACK Conference collocated with the ASME 2009 Summer Heat Transfer Conference and the ASME 2009 3rd International Conference on Energy Sustainability %T Site-Specific and On-Demand High Heat-Flux Cooling Using Superlattice Based Thin-Film Thermoelectrics %8 07/2009