%0 Patent
%A Alan M Myers
%A Je-Young Chang
%A Ravi S Prasher
%A Ioan Sauciuc
%A Gregory M Chrysler
%A Patrick D Boyd
%A Chia-Pin Chiu
%D 2007
%G eng
%T Integrated circuit coolant microchannel with compliant cover
%U https://patents.google.com/patent/US7259965B2/en
%8 08/2007
%X <p>An apparatus includes a microchannel structure having microchannels formed therein. The microchannels are to transport a coolant and to be proximate to an integrated circuit to transfer heat from the integrated circuit to the coolant. The apparatus also includes a cover positioned on the microchannel structure to define a respective upper wall of each of the microchannels. The cover presents a compliant surface to the microchannels.</p>