%0 Conference Paper %K Heating %K Vapors %A Je-Young Chang %A Unnikrishnan Vadakkan %A Ravi S Prasher %A Suzana Prstic %B ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference %D 2005 %G eng %I American Society of Mechanical Engineers %P 197–203 %R 10.1115/IPACK2005-73131 %S ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference %T Thermal Performance of Vapor Chambers Under Hot Spot Heating Conditions