%0 Patent %A Ravi S Prasher %D 2004 %G eng %T Thermoelectrically cooling electronic devices %U https://patents.google.com/patent/US6696635B2/en %X

A thermoelectric cooler utilizing superlattice and quantum-well materials may be deposited directly onto a die using thin-film deposition techniques. The materials may have a figure-of-merit of greater than one.