%0 Journal Article %A Ihtesham Chowdhury %A Ravi S Prasher %A Kelly Lofgreen %A Gregory M Chrysler %A Sridhar Narasimhan %A Ravi Mahajan %A David Koester %A Randall Alley %A Rama Venkatasubramanian %B Nat. Nanotechnol. %D 2009 %G eng %P 235–238 %R 10.1038/nnano.2008.417 %T On-chip cooling by superlattice-based thin-film thermoelectrics %V 4 %8 01/2009