%0 Conference Paper %K Water %K Silicon %K Fluids %K Flow (Dynamics) %K Plates (structures) %A Tao Tong %A Je-Young Chang %A Shankar Devasenathipathy %A John Dirner %A Suzana Prstic %A Ravi S Prasher %B ASME 2007 International Mechanical Engineering Congress and Exposition %D 2007 %G eng %I American Society of Mechanical Engineers %P 95–110 %R 10.1115/IMECE2007-42027 %S ASME 2007 International Mechanical Engineering Congress and Exposition %T Performances of Silicon Micro-Flow-Passage Cold Plates From Single-Phase to Two-Phase With Water and HFE-7100 as Working Fluids %8 11/2007