%0 Conference Paper
%A Richard E Russo
%A Alexander A Bol'shakov
%A Jong-Hyun Yoo
%A Jhanis J Gonzalez
%B Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII
%C San Francisco, CA
%D 2012
%G eng
%P 82430A-1
%R 10.1117/12.909548
%T Laser ablation plasmas for diagnostics of structured electronic and optical materials during or after laser processing
%V 8243
%8 02/2012