%0 Conference Paper
%A Alexander A Bol'shakov
%A Jong-Hyun Yoo
%A Jhanis J Gonzalez
%A Chunyi Liu
%A Richard E Russo
%B Applied Industrial Optics: Spectroscopy, Imaging and Metrology
%C Monterey, CA
%D 2012
%G eng
%I Optical Society of America
%R 10.1364/AIO.2012.ATu1A.1
%T Direct Real-Time Determination of Compositional Profiles in Structured Materials Using Laser Ablation Instruments: LIBS and LA-ICP-MS
%8 06/2012
%X <p>Laser ablation offers rapid micro-analysis with spatial resolution ~10 nm in depth, ~3 μm lateral. Structured materials are mapped, depth-profiled for elemental and isotopic composition using LIBS or LA-ICP-MS without dissolving samples. Molecular structure can be inferred by chemometric processing.</p>