%0 Journal Article
%K Physical vapor deposition
%K Plasma deposition
%K Transparent conductor
%A Yuankun Zhu
%A Rueben J Mendelsberg
%A Sunnie H.N Lim
%A Jiaqi Zhu
%A Jiecai Han
%A André Anders
%B Journal of Materials Research
%D 2012
%N 05
%P 857 - 862
%R 10.1557/jmr.2011.342
%T Improved structural and electrical properties of thin ZnO:Al films by dc filtered cathodic arc deposition
%V 27
%8 03/2012
%! J. Mater. Res.