%0 Conference Paper
%A André Anders
%B NanoSingapore 2006: IEEE Conference on Emerging Technologies - Nanoelectrics, January 10-13
%C Singapore
%D 2005
%S NanoSingapore 2006: IEEE Conference on Emerging Technologies - Nanoelectrics, January 10-13
%T Energetic or Not Energetic: Considerations for Fabricating Nanostructures by Physical Vapor Deposition
%2 LBNL-57734 Ext. Abs.
%8 06/2005