%0 Journal Article
%K Efficiency
%K Experimental
%K Ablation
%K Laser
%K Laser ablation
%K Laser ablation
%K Ablation efficiency
%K Plasma
%K Femtosecond
%K Nanosecond
%K Laser-induced plasma
%K Laser-induced plasma
%K Nanosecond laser
%K Silicon
%K Expansion
%A Xianzhong Zeng
%A Xianglei Mao
%A Ralph Greif
%A Richard E Russo
%B Applied Physics A: Materials science and processing
%D 2004
%F Laser
%G eng
%M 154
%P 237-241
%T Experimental investigation of ablation efficiency and laser-induced plasma expansion during femtosecond and nanosecond laser ablation of silicon
%V 80
%2 LBNL-55783