%0 Journal Article
%K temperature
%K measurement
%K film
%K films
%K thin
%K laser
%K excimer
%K excimer-laser
%K semiconductor
%K excimer laser
%A Xianfan Xu
%A Costas P Grigoropoulos
%A Richard E Russo
%B Journal of Heat and Mass Transfer
%D 1995
%F Laser
%G eng
%M 54
%P 17-24
%T Transient temperature measurement during pulsed excimer laser heating of thin semiconductor films
%V 117