%0 Journal Article
%K Temperature
%K Measurement
%K Film
%K Films
%K Thin
%K Laser
%K Excimer
%K Excimer laser
%K Semiconductor
%K Excimer laser
%A Xianfan Xu
%A Costas P Grigoropoulos
%A Richard E Russo
%B Journal of Heat and Mass Transfer
%D 1995
%F Laser
%G eng
%M 54
%P 17-24
%T Transient temperature measurement during pulsed excimer laser heating of thin semiconductor films
%V 117