%0 Journal Article
%K Energy
%K Gas
%K Surface
%K Pulse
%K Ablation
%K Laser
%K Laser ablation
%K Laser ablation
%K Field
%K Sample
%K Laser pulses
%K Pulses
%K Mechanism
%K Mechanisms
%K Femtosecond
%K Argon
%K Ga
%K Energies
%K Microprobe
%K Silicon
%K Generation
%K Air
%A Sy-Bor Wen
%A Ralph Greif
%A Richard E Russo
%B Applied Physics Letters
%D 2007
%F Laser
%G eng
%N 25
%R 10.1063/1.2827199
%T Background gas effect on the generation of nanopatterns on a pure silicon wafer with multiple femtosecond near field laser ablation
%V 91
%8 12/2007
%! Appl. Phys. Lett.