%0 Journal Article
%K Deposition
%K Surface
%K Emission
%K Power
%K Deflection
%K Material
%K Thin films
%K Laser
%K Spectroscopy
%K Time
%K Plasma
%K Solids
%K Emission spectroscopy
%K Emission spectroscopy
%K Process
%K Science
%K C
%K Icp-aes
%K Phase
%K M
%K Plasma shielding
%K Solid materials
%K Photothermal
%K Photothermal deflection
%K Heat
%K Laser-energy coupling to solid material
%K Melt
%K Phase change
%K Stress
%K Stresses
%K Switzerland
%A Mark A Shannon
%A Xianglei Mao
%A Richard E Russo
%B Materials Science and Engineering B-Solid State Materials for Advanced Technology
%D 1997
%F Laser
%G eng
%M 78
%P 172-179
%T Monitoring laser-energy coupling to solid materials: Plasma-shielding and phase change
%V 45
%X <p>For many laser-material processes, new methods are needed to monitor laser-energy coupling to solid materials. Different methods will be presented which can detect changes in laser-energy coupling due to plasma shielding, phase change, and surface alterations. The techniques used are inductively coupled plasma-atomic emission spectroscopy (ICP-AES), mechanical stress power (MSP), and photothermal deflection (PTD). This work demonstrates that the onset of plasma shielding can be detected for ns and ps laser interactions with solids, using ICP-AES and MSP, and that the onset of melt at a surface can be detected using PTD. (C) 1997 Elsevier Science S.A</p>