%0 Journal Article
%K deposition
%K surface
%K emission
%K power
%K deflection
%K material
%K thin-films
%K laser
%K spectroscopy
%K time
%K plasma
%K solids
%K emission spectroscopy
%K emission-spectroscopy
%K process
%K science
%K c
%K icp-aes
%K phase
%K m
%K plasma shielding
%K solid materials
%K photothermal
%K photothermal deflection
%K heat
%K laser-energy coupling to solid material
%K melt
%K phase change
%K stress
%K stresses
%K switzerland
%A Mark A Shannon
%A Xianglei Mao
%A Richard E Russo
%B Materials Science and Engineering B-Solid State Materials for Advanced Technology
%D 1997
%F Laser
%G eng
%M 78
%P 172-179
%T Monitoring laser-energy coupling to solid materials: Plasma-shielding and phase change
%V 45
%X <p>For many laser-material processes, new methods are needed to monitor laser-energy coupling to solid materials. Different methods will be presented which can detect changes in laser-energy coupling due to plasma shielding, phase change, and surface alterations. The techniques used are inductively coupled plasma-atomic emission spectroscopy (ICP-AES), mechanical stress power (MSP), and photothermal deflection (PTD). This work demonstrates that the onset of plasma shielding can be detected for ns and ps laser interactions with solids, using ICP-AES and MSP, and that the onset of melt at a surface can be detected using PTD. (C) 1997 Elsevier Science S.A</p>