%0 Journal Article
%K deposition
%K pulse
%K thin films
%K film
%K films
%K thin
%K thin film
%K thin-film
%K thin-films
%K laser
%K pulse laser
%K laser deposition
%A Richard E Russo
%A Samuel S Mao
%A Dale L Perry
%B Chemtech
%D 1994
%F Laser
%G eng
%M 47
%P 14-18
%T Pulse laser deposition of thin films
%V 24