%0 Journal Article
%K Deposition
%K Pulse
%K Thin films
%K Film
%K Films
%K Thin
%K Thin film
%K Thin-film
%K Thin films
%K Laser
%K Pulse laser
%K Laser deposition
%A Richard E Russo
%A Samuel S Mao
%A Dale L Perry
%B Chemtech
%D 1994
%F Laser
%G eng
%M 47
%P 14-18
%T Pulse laser deposition of thin films
%V 24