%0 Journal Article
%K deposition
%K temperature
%K pulsed laser deposition
%K film
%K thin
%K thin film
%K thin-film
%K thin-films
%K ablation
%K laser
%K laser ablation
%K laser-ablation
%K applications
%K superconducting
%K y-ba-cu-o
%K ybacuo
%K layers
%K oriented
%K time
%K ceo2
%K composition
%K structure
%K alloys
%K high temperature
%K density
%K pulsed laser
%K pulsed-laser
%K technology
%K m
%K current-density
%K substrate
%K substrates
%K layer
%K ybco
%K multilayers
%K dielectric
%K high-temperature
%K intermediate
%K k
%K laser deposition
%K polycrystalline
%K pulsed-laser-deposition
%K ysz
%K yttria stabilized zirconia
%K yttria-stabilized zirconia
%K yttria-stabilized-zirconia
%K zirconia
%K zirconium
%K pulsed-laser deposition
%K fabrication
%K amorphous
%K multichip modules
%K bombardment
%K critical current densities
%K critical-current-density
%K mu-m
%K pld
%K sio2
%A Ronald P Reade
%A Richard E Russo
%B Applied Surface Science
%D 1996
%F Laser
%G eng
%M 70
%P 726-730
%T Ion-Assisted Pulsed-Laser Deposition for the Fabrication of Y-Ba-Cu-O Multilayer Structures Using Oriented Intermediate Layers of YSZ and CeO<sub>2</sub>
%V 96-8
%X <p>One of the most significant recent applications of laser ablation is pulsed laser deposition (PLD), a powerful new technology for fabricating unique thin film compositions and structures. Ion-assisted PLD (IAPLD) enhances the capabilities of this technology by providing oriented thin-film structures on amorphous and randomly-ordered polycrystalline substrates. IAPLD is particularly well-suited for fabricating multilayer thin film structures suitable for high temperature superconducting multi-chip modules, We have fabricated such structures on 5.0 μm SiO<sub>2</sub> dielectric layers using IAPLD yttria-stabilized zirconia (YSZ) layers, obtaining critical current densities as high as 3 x 10<sup>5</sup> A/cm<sup>2</sup> at 77 K. We have also constructed YBCO/IAPLD-YSZ/SiO<sub>2</sub>/YSZ/YBCO/CeO<sub>2</sub>/YSZ and YBCO/IAPLD-YSZ/amorphous-YSZ/YBCO/CeO<sub>2</sub>/YSZ multilayers. In addition, we are working on IAPLD of oriented CeO<sub>2</sub> layers to improve the YBCO critical current densities</p>