%0 Journal Article
%K Deposition
%K Temperature
%K Pulsed laser deposition
%K Film
%K Thin
%K Thin film
%K Thin-film
%K Thin films
%K Ablation
%K Laser
%K Laser ablation
%K Laser ablation
%K Applications
%K Superconducting
%K Y-ba-cu-o
%K Ybacuo
%K Layers
%K Oriented
%K Time
%K Ceo2
%K Composition
%K Structure
%K Alloys
%K High temperature
%K Density
%K Pulsed laser
%K Pulsed laser
%K Technology
%K M
%K Current-density
%K Substrate
%K Substrates
%K Layer
%K Ybco
%K Multilayers
%K Dielectric
%K High-temperature
%K Intermediate
%K K
%K Laser deposition
%K Polycrystalline
%K Pulsed laser deposition
%K Ysz
%K Yttria stabilized zirconia
%K Yttria stabilized zirconia
%K Zirconia
%K Zirconium
%K Pulsed laser deposition
%K Fabrication
%K Amorphous
%K Multichip modules
%K Bombardment
%K Critical current densities
%K Critical-current-density
%K Mu-m
%K Pld
%K Sio2
%A Ronald P Reade
%A Richard E Russo
%B Applied Surface Science
%D 1996
%F Laser
%G eng
%M 70
%P 726-730
%T Ion-Assisted Pulsed-Laser Deposition for the Fabrication of Y-Ba-Cu-O Multilayer Structures Using Oriented Intermediate Layers of YSZ and CeO<sub>2</sub>
%V 96-8
%X <p>One of the most significant recent applications of laser ablation is pulsed laser deposition (PLD), a powerful new technology for fabricating unique thin film compositions and structures. Ion-assisted PLD (IAPLD) enhances the capabilities of this technology by providing oriented thin-film structures on amorphous and randomly-ordered polycrystalline substrates. IAPLD is particularly well-suited for fabricating multilayer thin film structures suitable for high temperature superconducting multi-chip modules, We have fabricated such structures on 5.0 μm SiO<sub>2</sub> dielectric layers using IAPLD yttria-stabilized zirconia (YSZ) layers, obtaining critical current densities as high as 3 x 10<sup>5</sup> A/cm<sup>2</sup> at 77 K. We have also constructed YBCO/IAPLD-YSZ/SiO<sub>2</sub>/YSZ/YBCO/CeO<sub>2</sub>/YSZ and YBCO/IAPLD-YSZ/amorphous-YSZ/YBCO/CeO<sub>2</sub>/YSZ multilayers. In addition, we are working on IAPLD of oriented CeO<sub>2</sub> layers to improve the YBCO critical current densities</p>