%0 Journal Article %K Deposition %K Pulsed laser deposition %K Laser %K Ybacuo %K Layers %K Structure %K Pulsed laser %K Pulsed laser %K Layer %K Dielectric %K Laser deposition %K Pulsed laser deposition %K Amorphous %K Multichip modules %A Ronald P Reade %A Paul H Berdahl %A Leonard W Schaper %A Richard E Russo %B Applied Physics Letters %D 1995 %F Laser %G eng %M 57 %N 15 %P 2001-2003 %R 10.1063/1.114285 %T Y-Ba-Cu-O multilayer structures with amorphous dielectric layers for multichip modules using ion-assisted pulsed laser deposition %V 66 %2 LBNL-36910 %! Appl. Phys. Lett.