%0 Journal Article
%K Target
%K USA
%K Microstructure
%K Experimental
%K Characterization
%K Film
%K Films
%K Applications
%K Oxide
%K Time
%K X-Ray
%K Ca
%K Composition
%K Element
%K Metals
%K Microprobe
%K Elements
%K Oxides
%K Phase
%K Pulsed laser
%K Pulsed laser
%K Targets
%K Thermal
%K Fluorescence
%K Ha
%K Standard
%K Metal
%K D
%K Distribution
%K Trace
%K L
%K Pulsed laser deposition
%K Synthesis
%K Catalysis
%K Catalysts
%K Components
%K Contaminants
%K Fluorescence microprobe
%K Heterogeneous catalysis
%K Metal oxide
%K O thin-films
%K Oxide films
%K Oxide-films
%K Resolution
%K Spatial resolution
%K Synchrotron radiation
%K Synchrotron x-ray fluorescence
%K X-ray fluorescence
%K X-ray fluorescence microprobe
%K X-ray-fluorescence
%K Yba2cu3o7-x
%A Dale L Perry
%A Albert C Thompson
%A Richard E Russo
%A Xianglei Mao
%A Karen L Chapman
%B Applied Spectroscopy
%D 1997
%F Laser
%G eng
%M 79
%N 12
%P 1781-1783
%T Characterization of quaternary metal oxide films by synchrotron X-ray fluorescence microprobe
%V 51
%2 LBNL-41165
%8 06/1997