%0 Journal Article
%K Film
%K Films
%K Laser
%K Superconducting
%K Superconducting films
%K Vaporization
%K Y-ba-cu-o
%K Ybacuo
%A Mehdi Balooch
%A Donald R Olander
%A Richard E Russo
%B Applied Physics Letters
%D 1989
%F Laser
%G eng
%N 2
%P 197
%R 10.1063/1.102405
%T Y-Ba-Cu-O superconducting films produced by long-pulse laser vaporization
%V 55
%X <p>Deposition of superconducting thin films from YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7</sub> targets using a long‐pulse (ms) Nd‐glass laser with 50 J/pulse energy has been demonstrated. The deposition rate was approximately 100 nm/pulse and the film stoichiometry was close to that of the target. Scanning electron microscopy revealed spherical inclusions in the film. Scanning tunneling microscopy in air showed a terrace‐ledge structure on the uniform portion of the film. A film produced by four pulses on a SrTiO<sub>3</sub> substrate, held at 540&thinsp;°C, and post‐annealed in O<sub>2</sub> at 850&thinsp;°C for about 2h exhibited an onset transition at 78 K and zero resistance at 61 K. This new approach can provide fast deposition rates and broad‐area film coverage per laser shot.</p>