%0 Journal Article %A Rueben J Mendelsberg %A Sunnie H.N Lim %A Yuankun Zhu %A Joe Wallig %A Delia J Milliron %A André Anders %B Journal of Physics D: Applied Physics %D 2011 %N 23 %P 232003-232007 %R 10.1088/0022-3727/44/23/232003 %T Achieving high mobility ZnO:Al at very high growth rates by dc filtered cathodic arc deposition %V 44 %2 LBNL-5585E %! J. Phys. D: Appl. Phys.