%0 Conference Paper
%A Ming-Shan Jeng
%A Tengfang T Xu
%A Chao-Ho Lan
%B SEMI Technology Symposium: Innovations in Semiconductor Manufacturing
%C San Francisco, CA
%D 2004
%G eng
%L LBNL-55039
%P 73-77
%S SEMI Technology Symposium: Innovations in Semiconductor Manufacturing
%T Towards Green Systems for Cleanrooms: Energy-Efficient Fan Filter Units
%1 <p>Applications Team</p>
%2 LBNL-55039
%8 07/2004