%0 Conference Paper %A André Anders %B 50th Technical Annual Meeting of the Society of Vacuum Coaters %D 2007 %G eng %L LBNL-61903 %S 50th Technical Annual Meeting of the Society of Vacuum Coaters %T Plasma and Ion Assistance in Physical Vapor Deposition: A Historical Perspective %1
Windows and Daylighting Group
%2 LBNL-61903