%0 Conference Paper %A André Anders %A Joakim Andersson %A David Horwat %A Arutiun P Ehiasarian %B ISSP2007: The 9th International Symposium on Sputtering & Plasma Processes %D 2007 %G eng %L LBNL-62147 %S ISSP2007: The 9th International Symposium on Sputtering & Plasma Processes %T Physics of High Power Impulse Magnetron Sputtering %1

Windows and Daylighting Group

%2 LBNL-62147