%0 Journal Article
%A Jacques Pelletier
%A André Anders
%B IEEE Transactions on Plasma Science
%D 2005
%G eng
%L LBNL-57610
%P 1944-1959
%T Plasma-Based Ion Implantation and Deposition: A Review of Physics, Technology, and Applications
%V 33
%1 <p>Windows and Daylighting Group</p>
%2 LBNL-57610