%0 Journal Article
%A Monica Veszelei
%A Lisen Kullman
%A Claes G Granqvist
%A Klaus von Rottkay
%A Michael D Rubin
%B Applied Optics
%D 1998
%G eng
%N 25
%P 5993-6001
%R 10.1364/AO.37.005993
%T Optical Constants of Sputter-Deposited Ti-Ce Oxide and Zr-Ce Oxide Films
%V 37
%1 <p>Windows and Daylighting Group</p>
%2 LBNL-42059
%8 09/1998
%X <p>Films of Ti oxide, Zr oxide, Ce oxide, Ti-Ce oxide, and Zr-Ce oxide were made by means of reactive dc magnetron sputtering in a multitarget arrangement. The films were characterized by x-ray diffraction and electrochemical measurements, both techniques being firmly connected to stoichiometric information. The optical constants n and k were evalued from spectrophotometry and from variable-angle spectroscopic ellipsometry. The two analyses gave consistent results. It was found that n for the mixed-oxide films varied smoothly between the values for the pure oxides, whereas k in the band-gap range showed characteristic differences between Ti-Ce oxide and Zr-Ce oxide. It is speculated that this difference is associated with structural effects.</p>