%0 Journal Article
%A Joakim Andersson
%A Arutiun P Ehiasarian
%A André Anders
%B Applied Physics Letters
%D 2008
%G eng
%N 7
%P 71504
%R 10.1063/1.2973179
%T Observation of Ti4+ ions in a high power impulse magnetron sputtering plasma
%V 93
%1 <p>Windows and Daylighting Group</p>
%2 LBNL-680E
%8 08/2008
%X <p>Multiply charged titanium ions including Ti<sup>4+</sup> were observed in high power impulse magnetron sputtering discharges. Mass/charge spectrometry was used to identify metal ion species. Quadruply charged titanium ions were identified by isotope-induced broadening at mass/charge 12. Due to their high potential energy, Ti<sup>4+</sup> ions give a high yield of secondary electrons, which in turn are likely to be responsible for the generation of multiply charged states.</p>