%0 Journal Article %K Constricted plasma source %K Atomic and molecular ions %K Ion energy distribution functions %K Oxygen plasma %A André Anders %A Georgy Yu Yushkov %B Review of Scientific Instruments %D 2007 %G eng %M 25684701 %N 4 %T A low-energy linear oxygen plasma source %V 78 %1
Windows and Daylighting Group
%2 LBNL-62169 %8 04/2007