%0 Journal Article
%K Constricted plasma source
%K Gas plasma flow
%K Plasma diagnostics
%K Plasma processing of materials
%A André Anders
%A Robert A MacGill
%A Michael D Rubin
%B IEEE Transactions on Plasma Science
%D 1999
%G eng
%N 1
%P 82-83
%T Evaluation of the Plasma Distribution of a Quasi-Linear Constricted Plasma Source
%V 27
%1 <p>Windows and Daylighting Group</p>
%2 LBNL-42016
%8 02/1999
%X <p>The quasi-linear constricted plasma source is a downstream plasma source with ten linearly aligned discharge cells. Each cell operates on the basis of a constricted glow discharge. The plasma output can easily be monitored by the plasma-emitted light. The information is not only intuitive but can also be used to operate on-line feedback control of the plasma source which is important for large-area plasma processing of materials.</p>