%0 Conference Paper
%A Tengfang T Xu
%B ESTECH 2003
%C Phoenix, AZ
%D 2003
%G eng
%L LBNL-52004
%P 108-116
%S ESTECH 2003
%T Efficient Airflow Design for Cleanrooms Improves Business Bottom Lines
%1 <p>Applications Team</p>
%2 LBNL-52004
%8 05/2003