%0 Conference Paper
%A James S Chan
%A T.C Fu
%A Nathan W Cheung
%A Jennifer T Ross
%A Nathan Newman
%A Michael D Rubin
%B Materials Research Society
%C San Francisco, CA
%D 1993
%G eng
%S Materials Research Society
%T Comparison of AIN Films Grown by RF at Magnetron Sputtering and Ion-Assisted Molecular Beam Epitaxy
%V 300
%1 <p>Windows and Daylighting Group</p>
%2 LBL-35660
%8 04/1993