%0 Conference Paper
%A William F Tschudi
%A Tengfang T Xu
%B ASHRAE Transactions
%C Kansas City, MO
%D 2001
%G eng
%L LBNL-50219
%P 733-739
%S ASHRAE Transactions
%T Cleanroom Energy Benchmarking Results
%V 109, part 2
%1 <p>Applications Team</p>
%2 LBNL-50219
%8 07/2003