%0 Conference Paper
%A William F Tschudi
%A Kathleen Benschine
%A Stephen Fok
%A Peter Rumsey
%B 2001 ACEEE Summer Study on Energy Efficiency in Industry
%C Tarrytown, NY
%D 2001
%G eng
%L LBNL-47729
%S 2001 ACEEE Summer Study on Energy Efficiency in Industry
%T Cleanroom Energy Benchmarking in High-Tech and Biotech Industries
%1 <p>Applications Team</p>
%2 LBNL-47729
%8 07/2001