%0 Conference Paper %A Tengfang T Xu %B 5th China International Academic Forum and Products Exposition on Contamination Control Technology, Construction Sub-Council of China Council for the Promotion of International Trade and Chinese Contamination Control Society %C Beijing, China %D 2002 %G eng %L LBNL-51549 %S 5th China International Academic Forum and Products Exposition on Contamination Control Technology, Construction Sub-Council of China Council for the Promotion of International Trade and Chinese Contamination Control Society %T Airflow Design for Cleanrooms and Its Economic Implications %1

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%2 LBNL-51549 %8 11/2002