%0 Conference Paper %A André Anders %B 51st Annual Technical Meeting of the Society of Vacuum Coaters %D 2008 %G eng %L LBNL-170E %S 51st Annual Technical Meeting of the Society of Vacuum Coaters %T Deposition Rates of High Power Impulse Magneton Sputtering %1
Windows and Daylighting Group
%2 LBNL-170E %8 04/2008