%0 Journal Article
%K Energy savings
%K Cleanroom
%K Demand-controlled filtration
%K Particle counter
%A David Faulkner
%A William J Fisk
%A John T Walton
%B Journal of the Institute of Environmental Sciences
%D 1996
%G eng
%N 6
%P 21-27
%T Energy Savings in Cleanrooms from Demand-Controlled Filtration
%U http://iestjournal.org/doi/abs/10.17764/jiet.2.39.6.k8792h8164vk5218
%V 39
%2 LBNL-38869
%8 11/1996