TY - JOUR
AU - Peter Dudenas
AU - Adam Z Weber
AU - Ahmet Kusoglu
AB - <p><span>Grazing-incidence X-ray scattering is a common technique to elucidate nanostructural information for thin-film samples, but depth-resolving this nanostructure is difficult using a single or few images. An&nbsp;</span><span class="it"><em>in situ</em></span><span>&nbsp;method to extract film thickness, the index of refraction and depth information using scattering images taken across a range of incident angles is presented here. The technique is described within the multilayer distorted-wave Born approximation and validated using two sets of polymer thin films. Angular divergence and energy resolution effects are considered, and implementation of the technique as a general beamline procedure is discussed. Electric-field-intensity-modulated scattering is a general technique applicable to myriad materials and enables the acquisition of depth-sensitive information&nbsp;</span><span class="it"><em>in situ</em></span><span>&nbsp;at any grazing-incidence-capable beamline.</span></p>
BT - Journal of Applied Crystallography
DA - 11/2020
DO - 10.1107/S160057672001304710.1107/S1600576720013047/ge5076sup1.pdf
IS - 6
LA - eng
N2 - <p><span>Grazing-incidence X-ray scattering is a common technique to elucidate nanostructural information for thin-film samples, but depth-resolving this nanostructure is difficult using a single or few images. An&nbsp;</span><span class="it"><em>in situ</em></span><span>&nbsp;method to extract film thickness, the index of refraction and depth information using scattering images taken across a range of incident angles is presented here. The technique is described within the multilayer distorted-wave Born approximation and validated using two sets of polymer thin films. Angular divergence and energy resolution effects are considered, and implementation of the technique as a general beamline procedure is discussed. Electric-field-intensity-modulated scattering is a general technique applicable to myriad materials and enables the acquisition of depth-sensitive information&nbsp;</span><span class="it"><em>in situ</em></span><span>&nbsp;at any grazing-incidence-capable beamline.</span></p>
PY - 2020
SP - 1484 
EP -  1492
ST - J Appl Crystallography
T2 - Journal of Applied Crystallography
TI - Electric-field-intensity-modulated scattering as a thin-film depth probe
VL - 53
ER -