TY - CPAPER
KW - Cooling
KW - Deposition
KW - Thin films
KW - Annealing
KW - Laser ablation
KW - Electrodes
KW - Ferroelectric materials
KW - Lead compounds
KW - Crystal defects
KW - Lead zirconate titanate (PZT)
KW - Sol-gels
KW - Positron annihilation
KW - Titanium oxides
KW - Vacancy-related defects
AU - A Krishnan
AU - D.J Keeble
AU - Ramamoorthy Ramesh
AU - W.L Warren
AU - B.A Tuttle
AU - R.L Pfeffer
AU - B Nielsen
AU - K.G Lynn
AB - Positron annihilation techniques have been applied to characterize vacancy-related defects in ferroelectric thin film structures. Variable energy positron beam measurements were carried out on doped and undoped Pb(Zr,Ti)O3 (PZT) samples subjected to different post-deposition cool down and anneal conditions. The PZT was deposited by sol-gel with either with platinum or RuO2 electrodes, or by laser ablation with La0.5Sr0.5CoO3 electrodes. The RuO2 and La0.5Sr0.5CoO3 electrode samples showed a smaller S-parameter compared to those deposited with Pt electrodes consistent with an improved PZT layer quality. For laser ablated samples cooled in a reducing ambient an increase in S-parameter for both the PZT and La0.5Sr0.5CoO3 layers was observed indicating an increase in neutral or negatively charged open-volume defects.
BT - Proceedings of the Materials Research Society Symposium -
LA - eng
N1 - cited By 4
N2 - Positron annihilation techniques have been applied to characterize vacancy-related defects in ferroelectric thin film structures. Variable energy positron beam measurements were carried out on doped and undoped Pb(Zr,Ti)O3 (PZT) samples subjected to different post-deposition cool down and anneal conditions. The PZT was deposited by sol-gel with either with platinum or RuO2 electrodes, or by laser ablation with La0.5Sr0.5CoO3 electrodes. The RuO2 and La0.5Sr0.5CoO3 electrode samples showed a smaller S-parameter compared to those deposited with Pt electrodes consistent with an improved PZT layer quality. For laser ablated samples cooled in a reducing ambient an increase in S-parameter for both the PZT and La0.5Sr0.5CoO3 layers was observed indicating an increase in neutral or negatively charged open-volume defects.
PB - Materials Research Society, Pittsburgh, PA, United States
PY - 1995
SP - 129
EP - 134
T2 - Proceedings of the Materials Research Society Symposium -
T3 - Materials Research Society Symposium -
TI - Vacancy related defects in thin film Pb(ZrTi)O3 materials
VL - 361
SN - 02729172
ER -