TY - JOUR AU - J Lee AU - Ramamoorthy Ramesh AB - Fatigue of Pb(Zr0.52Ti0.48)O3 (PZT) thin film capacitors under UV light (He-Cd laser, λ=325 nm) was studied. The remnant polarization of PZT films increased upon UV light illumination. The change in the polarization of PZT films upon UV light illumination increased with fatigue cycling. The photoresponse of PZT films under red light (He-Ne laser, λ=633 nm) was also studied. The difference in the steady-state photocurrents of negatively and positively poled PZT films was observed and was found to increase with fatigue cycling. Those results were examined within the framework of polarization screening by defects which is suggested to be responsible for fatigue of PZT films. This leads to a conclusion that more charged defects responsible for fatigue are involved in the fatigue process through internal polarization screening with fatigue cycling. © 1995, Taylor & Francis Group, LLC BT - Integrated Ferroelectrics DO - 10.1080/10584589508019372 LA - eng M1 - 1-4 N1 - cited By 9 N2 - Fatigue of Pb(Zr0.52Ti0.48)O3 (PZT) thin film capacitors under UV light (He-Cd laser, λ=325 nm) was studied. The remnant polarization of PZT films increased upon UV light illumination. The change in the polarization of PZT films upon UV light illumination increased with fatigue cycling. The photoresponse of PZT films under red light (He-Ne laser, λ=633 nm) was also studied. The difference in the steady-state photocurrents of negatively and positively poled PZT films was observed and was found to increase with fatigue cycling. Those results were examined within the framework of polarization screening by defects which is suggested to be responsible for fatigue of PZT films. This leads to a conclusion that more charged defects responsible for fatigue are involved in the fatigue process through internal polarization screening with fatigue cycling. © 1995, Taylor & Francis Group, LLC PY - 1995 SP - 289 EP - 300 T2 - Integrated Ferroelectrics TI - Fatigue and photoresponse of lead zirconate titanate thin film capacitors VL - 6 SN - 10584587 ER -