TY - RPRT
KW - Thin films
KW - Annealing
KW - Substrates
KW - Morphology
KW - Ferroelectric materials
KW - Epitaxial growth
KW - Phase composition
KW - Subgrains
AU - L Ryen
AU - C Kwon
AU - Ramamoorthy Ramesh
AU - E Olsson
AB - An epitaxial (001) SrTiO3 thin film, pulsed laser deposited on a LaAlO3 substrate, has been investigated using analytical transmission electron microscopy and x-ray diffraction. The film contained two different phases, with sharp compositional boundaries between the phases. One phase was 18% Sr-deficient, exhibited a columnar subgrain morphology, and had a large spread in the lattice parameter values. The other phase was stoichiometric SrTiO3, single crystalline, and defect-free. The results show that film stoichiometry is important if interfacial strain and columnar growth is to be avoided. A Sr-rich target and high-temperature annealing are two suggested precautions to improve homogeneity and stoichiometry.
BT - Doktorsavhandlingar vid Chalmers Tekniska Hogskola
LA - eng
M1 - 1414
N1 - cited By 0
N2 - An epitaxial (001) SrTiO3 thin film, pulsed laser deposited on a LaAlO3 substrate, has been investigated using analytical transmission electron microscopy and x-ray diffraction. The film contained two different phases, with sharp compositional boundaries between the phases. One phase was 18% Sr-deficient, exhibited a columnar subgrain morphology, and had a large spread in the lattice parameter values. The other phase was stoichiometric SrTiO3, single crystalline, and defect-free. The results show that film stoichiometry is important if interfacial strain and columnar growth is to be avoided. A Sr-rich target and high-temperature annealing are two suggested precautions to improve homogeneity and stoichiometry.
PB - Chalmers Tekniska Hogskola, Goteborg, Sweden
PY - 1998
SP - 1
EP - 6
T2 - Doktorsavhandlingar vid Chalmers Tekniska Hogskola
TI - Two-phase separation in epitaxial (001) SrTiO3 thin films on LaAlO3 substrates
SN - 0346718X
ER -