TY - JOUR KW - Perovskite KW - Oxides KW - Polarization KW - Ferroelectric materials KW - Thin film devices KW - MOS devices KW - Heterojunctions KW - Lead compounds KW - Lead zirconate titanate (PZT) KW - Point defects KW - Barium titanate KW - Relaxation processes KW - Electric conductivity of solids KW - Fatigue of materials AU - S Aggarwal AU - Ramamoorthy Ramesh AB - This article reviews the defect chemistry of perovskite ferroelectric oxides such as barium titanate and lead zirconate titanate. Such metal oxides are being considered for a wide range of applications that include nonvolatile memories and dynamic random access memories. Time-dependent degradation of these devices is controlled at least in part by point defects, which are determined by the defect chemistry of the material. The role of point defects on Pb(Zr,Ti)O3 thin film device properties such as fatigue, switching, polarization relaxation and imprint is discussed. BT - Annual Review of Materials Science DO - 10.1146/annurev.matsci.28.1.463 LA - eng M1 - 1 N1 - cited By 78 N2 - This article reviews the defect chemistry of perovskite ferroelectric oxides such as barium titanate and lead zirconate titanate. Such metal oxides are being considered for a wide range of applications that include nonvolatile memories and dynamic random access memories. Time-dependent degradation of these devices is controlled at least in part by point defects, which are determined by the defect chemistry of the material. The role of point defects on Pb(Zr,Ti)O3 thin film device properties such as fatigue, switching, polarization relaxation and imprint is discussed. PB - Annual Reviews Inc. PY - 1998 SP - 463 EP - 499 T2 - Annual Review of Materials Science TI - Point defect chemistry of metal oxide heterostructures VL - 28 SN - 00846600 ER -