TY - JOUR
AU - S Sadashivan
AU - S Aggarwal
AU - T.K Song
AU - Ramamoorthy Ramesh
AU - J .T Jr
AU - B.A Tuttle
AU - W.L Warren
AU - D Dimos
AB - We have investigated the imprint characteristics of fully integrated ferroelectric lead zirconate titanate based capacitors. These capacitors were fabricated using conducting perovskite La-Sr-Co-O electrodes. We have specifically focused on the effect of several test and capacitor variables, including temperature, unipolar stress amplitude, number of cycles, and device area. Two different figures of merit, one based on coercive voltage changes and the other based on differences in polarization values were used to quantify imprint. The imprint in our capacitors showed a small temperature dependence over the range that we have studied. The unidirectional pulse voltage amplitude had a larger influence on the imprint. © 1998 American Institute of Physics.
BT - Journal of Applied Physics
DO - 10.1063/1.366954
LA - eng
M1 - 4
N1 - cited By 48
N2 - We have investigated the imprint characteristics of fully integrated ferroelectric lead zirconate titanate based capacitors. These capacitors were fabricated using conducting perovskite La-Sr-Co-O electrodes. We have specifically focused on the effect of several test and capacitor variables, including temperature, unipolar stress amplitude, number of cycles, and device area. Two different figures of merit, one based on coercive voltage changes and the other based on differences in polarization values were used to quantify imprint. The imprint in our capacitors showed a small temperature dependence over the range that we have studied. The unidirectional pulse voltage amplitude had a larger influence on the imprint. © 1998 American Institute of Physics.
PB - American Institute of Physics Inc.
PY - 1998
SP - 2165
EP - 2171
T2 - Journal of Applied Physics
TI - Evaluation of imprint in fully integrated (La,Sr)CoO3/Pb(Nb,Zr,Ti)O3/(La,Sr)CoO3 ferroelectric capacitors
VL - 83
SN - 00218979
ER -