TY - JOUR AU - D.J Keeble AU - B Nielsen AU - A Krishnan AU - K.G Lynn AU - S Madhukar AU - Ramamoorthy Ramesh AU - C.F Young AB - A study of vacancy-related defects in ferroelectric capacitors was performed using a variable energy positron beam (VEPB). Heterostructures of (Pb0.9La0.1)(Zr0.2Ti0.8)O 3 (PLZT) ferroelectric with La0.5Sr0.5CoO3 (LSCO) electrodes were deposited by pulsed laser deposition and the effects of oxygen deficiency studied using structures grown with 760 and 1×10-5Torr oxygen. The VEPB depth profile showed an increase in vacancy-related defects with increased oxygen nonstoichiometry. A study of LSCO and PLZT thin films was also performed. The formation of vacancy clusters in the LSCO top electrode, and VPb-VO defects in the PLZT layer, with increased oxygen deficiency is inferred. © 1998 American Institute of Physics. BT - Applied Physics Letters DO - 10.1063/1.121820 LA - eng M1 - 3 N1 - cited By 45 N2 - A study of vacancy-related defects in ferroelectric capacitors was performed using a variable energy positron beam (VEPB). Heterostructures of (Pb0.9La0.1)(Zr0.2Ti0.8)O 3 (PLZT) ferroelectric with La0.5Sr0.5CoO3 (LSCO) electrodes were deposited by pulsed laser deposition and the effects of oxygen deficiency studied using structures grown with 760 and 1×10-5Torr oxygen. The VEPB depth profile showed an increase in vacancy-related defects with increased oxygen nonstoichiometry. A study of LSCO and PLZT thin films was also performed. The formation of vacancy clusters in the LSCO top electrode, and VPb-VO defects in the PLZT layer, with increased oxygen deficiency is inferred. © 1998 American Institute of Physics. PY - 1998 SP - 318 EP - 320 T2 - Applied Physics Letters TI - Vacancy defects in (Pb, La)(Zr, Ti)O3 capacitors observed by positron annihilation VL - 73 SN - 00036951 ER -