TY - CPAPER KW - Cooling KW - Thin films KW - Film growth KW - Oxygen KW - Ferroelectric materials KW - Lanthanum KW - Doping (additives) KW - Lead compounds KW - Crystal defects KW - Partial pressure KW - Doppler effect KW - Positron annihilation KW - Dielectric films KW - Vacancy-related defects AU - T Friessnegg AU - S Aggarwal AU - B Nielsen AU - Ramamoorthy Ramesh AU - D.J Keeble AU - E.H Poindexter AB - The formation of vacancy-type defects in Pb(1-x)Lax(Zr0.2Ti0.8)O3 (PLZT) thin films was studied as a function of lanthanum doping x and after cooling in an oxygen reduced ambient. The Doppler-broadening S parameter indicates that Pb-vacancies are progressively introduced upon La-doping. Cooling of Pb(Zr0.2Ti0.8)O3 and Pb0.9La0.1(Zr0.2Ti0.8)O3 thin films in 10-5 Torr oxygen partial pressure after growth exhibits an increase in the density of vacancy type defects compared to films cooled in 760 Torr. It is proposed that the defects formed are lead-oxygen vacancy complexes. BT - IEEE International Symposium on Applications of Ferroelectrics LA - eng N1 - cited By 2 N2 - The formation of vacancy-type defects in Pb(1-x)Lax(Zr0.2Ti0.8)O3 (PLZT) thin films was studied as a function of lanthanum doping x and after cooling in an oxygen reduced ambient. The Doppler-broadening S parameter indicates that Pb-vacancies are progressively introduced upon La-doping. Cooling of Pb(Zr0.2Ti0.8)O3 and Pb0.9La0.1(Zr0.2Ti0.8)O3 thin films in 10-5 Torr oxygen partial pressure after growth exhibits an increase in the density of vacancy type defects compared to films cooled in 760 Torr. It is proposed that the defects formed are lead-oxygen vacancy complexes. PB - IEEE, Piscataway, NJ, United States PY - 1998 SP - 147 EP - 150 T2 - IEEE International Symposium on Applications of Ferroelectrics T3 - IEEE International Symposium on Applications of Ferroelectrics TI - Investigation of vacancy-related defects in (Pb,La)(Zr,Ti)O3 thin films using positron annihilation ER -