TY - JOUR KW - Thin films KW - Electric potential KW - Ferroelectric devices KW - Semiconductor device manufacture KW - Phase shifters KW - Barium strontium titanate KW - Microstrip lines KW - Phase shift KW - Ku band AU - F.W Van Keuls AU - R.R Romanofsky AU - N.D Varaljay AU - F.A Miranda AU - C.L Canedy AU - S Aggarwal AU - T Venkatesan AU - Ramamoorthy Ramesh AB - We report on the performance of a Ku-band gold/ Ba0.5Sr0.5TiO3/LaAlO3 (Au/BSTO/LAO) coupled microstip line phase shifter fabricated with a 370 nm thick BSTO film. Two hundred degrees of contiguous relative insertion phase shift (ΔφS21), with insertion losses of 4.6 dB, were measured at room temperature, 14.3 GHz, and maximum dc voltage of 400 V. These results represent significant progress toward viable compact, low-loss, thin-film ferroelectric-based phase shifters at room temperature. © 1999 John Wiley & Sons, Inc. BT - Microwave and Optical Technology Letters DO - 10.1002/(SICI)1098-2760(19990105)20:1<53::AID-MOP15>3.0.CO;2-L LA - eng M1 - 1 N1 - cited By 33 N2 - We report on the performance of a Ku-band gold/ Ba0.5Sr0.5TiO3/LaAlO3 (Au/BSTO/LAO) coupled microstip line phase shifter fabricated with a 370 nm thick BSTO film. Two hundred degrees of contiguous relative insertion phase shift (ΔφS21), with insertion losses of 4.6 dB, were measured at room temperature, 14.3 GHz, and maximum dc voltage of 400 V. These results represent significant progress toward viable compact, low-loss, thin-film ferroelectric-based phase shifters at room temperature. © 1999 John Wiley & Sons, Inc. PB - John Wiley and Sons Inc. PY - 1999 SP - 53 EP - 56 T2 - Microwave and Optical Technology Letters TI - A Ku-band gold/BaxSr1-xTiO3/LaAlO3 conductor/thin-film ferroelectric microstrip line phase shifter for room-temperature communications applications VL - 20 SN - 08952477 ER -