TY - CPAPER KW - Thin films KW - Annealing KW - Substrates KW - Manganese KW - Lanthanum compounds KW - Ferroelectric materials KW - Permittivity KW - Semiconductor doping KW - Barium compounds KW - Magnesia KW - Antenna phased arrays KW - Phase shifters KW - Microstrip devices KW - Coupled microstrip phase shifters KW - Film thickness KW - Thin ferroelectric films AU - F.W Van Keuls AU - C.H Mueller AU - F.A Miranda AU - R.R Romanofsky AU - C.L Canedy AU - S Aggarwal AU - T Venkatesan AU - Ramamoorthy Ramesh AU - J.S Horwitz AU - W L Chang AU - W.J Kim AB - We report on measurements taken on thirteen Ku-band coupled microstrip phase shifters (CMPS) using thin ferroelectric films of BaxSr1-xTiO3. This CMPS design is a recent innovation designed to take advantage of the high tunability and tolerate the high dielectric constant of ferroelectric films at Ku- and K-band frequencies. These devices are envisioned as a component in low-cost steerable beam phased array antennas. Comparisons are made between devices with differing film thickness, annealed vs. unannealed, Mn-doped vs. undoped, and also substrates of LaAlO3 and MgO. BT - IEEE MTT-S International Microwave Symposium Digest LA - eng N1 - cited By 37 N2 - We report on measurements taken on thirteen Ku-band coupled microstrip phase shifters (CMPS) using thin ferroelectric films of BaxSr1-xTiO3. This CMPS design is a recent innovation designed to take advantage of the high tunability and tolerate the high dielectric constant of ferroelectric films at Ku- and K-band frequencies. These devices are envisioned as a component in low-cost steerable beam phased array antennas. Comparisons are made between devices with differing film thickness, annealed vs. unannealed, Mn-doped vs. undoped, and also substrates of LaAlO3 and MgO. PB - IEEE, Piscataway, NJ, United States PY - 1999 SP - 737 EP - 740 T2 - IEEE MTT-S International Microwave Symposium Digest T3 - IEEE MTT-S International Microwave Symposium Digest TI - Room temperature thin film BaxSr1-xTiO3 Ku-band coupled microstrip phase shifters: effects of film thickness, doping, annealing and substrate choice VL - 2 SN - 0149645X ER -