TY - JOUR
AU - D.E Steinhauer
AU - C.P Vlahacos
AU - F.C Wellstood
AU - S.M Anlage
AU - C Canedy
AU - Ramamoorthy Ramesh
AU - A Stanishevsky
AU - J Melngailis
AB - We describe the use of a near-field scanning microwave microscope to image the permittivity and tunability of bulk and thin film dielectric samples on a length scale of about 1 μm. The microscope is sensitive to the linear permittivity, as well as to nonlinear dielectric terms, which can be measured as a function of an applied electric field. We introduce a versatile finite element model for the system, which allows quantitative results to be obtained. We demonstrate use of the microscope at 7.2 GHz with a 370 nm thick Ba0.6Sr0.4TiO3 thin film on a LaAlO3 substrate. This technique is nondestructive and has broadband (0.1-50 GHz) capability. The sensitivity of the microscope to changes in permittivity is Δ∈r=2 at ∈r=500, while the nonlinear dielectric tunability sensitivity is Δ∈113=10-3 (kV/cm)-1. © 2000 American Institute of Physics.
BT - Review of Scientific Instruments
DO - 10.1063/1.1150687
LA - eng
M1 - 7
N1 - cited By 70
N2 - We describe the use of a near-field scanning microwave microscope to image the permittivity and tunability of bulk and thin film dielectric samples on a length scale of about 1 μm. The microscope is sensitive to the linear permittivity, as well as to nonlinear dielectric terms, which can be measured as a function of an applied electric field. We introduce a versatile finite element model for the system, which allows quantitative results to be obtained. We demonstrate use of the microscope at 7.2 GHz with a 370 nm thick Ba0.6Sr0.4TiO3 thin film on a LaAlO3 substrate. This technique is nondestructive and has broadband (0.1-50 GHz) capability. The sensitivity of the microscope to changes in permittivity is Δ∈r=2 at ∈r=500, while the nonlinear dielectric tunability sensitivity is Δ∈113=10-3 (kV/cm)-1. © 2000 American Institute of Physics.
PB - American Institute of Physics Inc.
PY - 2000
SP - 2751
EP - 2758
T2 - Review of Scientific Instruments
TI - Quantitative imaging of dielectric permittivity and tunability with a near-field scanning microwave microscope
VL - 71
SN - 00346748
ER -