TY - JOUR KW - Thin films KW - Lanthanum compounds KW - Ferroelectricity KW - Interfaces (materials) KW - Dislocations (crystals) KW - Strain KW - Barium compounds KW - Crystal microstructure KW - Phase shifters KW - Film crystallinity KW - High resolution X ray diffractometry KW - Lanthanum strontium oxides KW - Paraelectric films AU - C.H Mueller AU - F.W Van Keuls AU - R.R Romanofsky AU - F.A Miranda AU - J.D Warner AU - C.L Canedy AU - Ramamoorthy Ramesh AB - The microstructural properties of (Ba0.5Sr0.5)TiO3 (BSTO) thin films (300, 700, and 1400 nm thick) deposited on LaAlO3 (LAO) substrates were characterized using high-resolution x-ray diffractometery. Film crystallinity was the parameter that most directly influenced tunability, and we observed that a) the crystalline quality was highest in the thinnest film and progressively degraded with increasing film thickness; and b) strain at the film/substrate interface was completely relieved via dislocation formation. Paraelectric films such as BSTO offer an attractive means of incorporating low-cost phase shifter circuitry into beam-steerable reflectarray antennas. © 2000 OPA (Overseas Publishers Association) N.V. Published by license under the Gordon and Breach Science Publishers imprint. BT - Integrated Ferroelectrics DO - 10.1080/10584580008222227 LA - eng M1 - 1-4 N1 - cited By 7 N2 - The microstructural properties of (Ba0.5Sr0.5)TiO3 (BSTO) thin films (300, 700, and 1400 nm thick) deposited on LaAlO3 (LAO) substrates were characterized using high-resolution x-ray diffractometery. Film crystallinity was the parameter that most directly influenced tunability, and we observed that a) the crystalline quality was highest in the thinnest film and progressively degraded with increasing film thickness; and b) strain at the film/substrate interface was completely relieved via dislocation formation. Paraelectric films such as BSTO offer an attractive means of incorporating low-cost phase shifter circuitry into beam-steerable reflectarray antennas. © 2000 OPA (Overseas Publishers Association) N.V. Published by license under the Gordon and Breach Science Publishers imprint. PB - Taylor and Francis Inc. PY - 2000 SP - 139 EP - 149 T2 - Integrated Ferroelectrics TI - Characterization of (Ba0.5Sr0.5)TiO3 thin films for Ku-band phase shifters VL - 28 SN - 10584587 ER -