TY - CPAPER
KW - Strontium compounds
KW - Ferroelectric devices
KW - Lead compounds
KW - Non-volatile storage
KW - Capacitors
KW - Ferroelectric memories
KW - Size determination
KW - Electrical testing
KW - Ferroelectric nonvolatile memory devices (FeRAM)
KW - Memory cell capacitors
AU - T Schmitz
AU - K Prume
AU - S Tiedke
AU - A Roelofs
AU - T Schneller
AU - U Kall
AU - M Grossmann
AU - R Waser
AU - C Ganpule
AU - A Stanishefsky
AU - Ramamoorthy Ramesh
AB - Pb(Zr,Ti)O3 (PZT) and SrBi2Ta2O9 (SBT) are promising candidates for the use as cell capacitor materials in ferroelectric non-volatile memory devices (FeRAMs). For years it has been an outstanding challenge to perform electrical measurements on samples with pad sizes which are equal to the pad size of real cell capacitors of integrated memory devices. Up to now either larger sample capacitors or an array of several hundred capacitors in parallel could be investigated with typical measurement techniques [1]. But, both measurements can hardly detect the failure of a single capacitor in the submicron range. © 2001 Taylor and Francis.
BT - Integrated Ferroelectrics
DO - 10.1080/10584580108015676
LA - eng
M1 - 1-4
N1 - cited By 2
N2 - Pb(Zr,Ti)O3 (PZT) and SrBi2Ta2O9 (SBT) are promising candidates for the use as cell capacitor materials in ferroelectric non-volatile memory devices (FeRAMs). For years it has been an outstanding challenge to perform electrical measurements on samples with pad sizes which are equal to the pad size of real cell capacitors of integrated memory devices. Up to now either larger sample capacitors or an array of several hundred capacitors in parallel could be investigated with typical measurement techniques [1]. But, both measurements can hardly detect the failure of a single capacitor in the submicron range. © 2001 Taylor and Francis.
PY - 2001
SP - 163
EP - 172
T2 - Integrated Ferroelectrics
T3 - Integrated Ferroelectrics
TI - Electrical measurements on capacitor sizes in the submicron regime for the characterization of real memory cell capacitors
VL - 37
SN - 10584587
ER -