TY - JOUR
KW - Thin films
KW - Transmission electron microscopy
KW - Silicon
KW - Substrates
KW - Epitaxial growth
KW - Computer simulation
KW - Strontium compounds
KW - Interfaces (materials)
KW - Crystal lattices
KW - Dislocations (crystals)
KW - Heteroepitaxy
KW - Crystal microstructure
KW - High resolution electron microscopy
KW - Image analysis
AU - G.Y Yang
AU - J.M Finder
AU - J Wang
AU - Z.L Wang
AU - Z Yu
AU - J Ramdani
AU - R Droopad
AU - K.W Eisenbeiser
AU - Ramamoorthy Ramesh
AB - Microstructure in the SrTiO3/Si system has been studied using high-resolution transmission electron microscopy and image simulations. SrTiO3 grows heteroepitaxially on Si with the orientation relationship given by (001)STO//(001)Si and [100]STO//[110]Si. The lattice misfit between the SrTiO3 thin films and the Si substrate is accommodated by the presence of interfacial dislocations at the Si substrate side. The interface most likely consists of Si bonded to O in SrTiO3. The alternative presentation of Sr and Si atoms along the interface leads to the formation of 2× and 3× Sr configurations. Structural defects in the SrTiO3 thin film mainly consist of tilted domains and dislocations.
BT - Journal of Materials Research
DO - 10.1557/JMR.2002.0030
LA - eng
M1 - 1
N1 - cited By 30
N2 - Microstructure in the SrTiO3/Si system has been studied using high-resolution transmission electron microscopy and image simulations. SrTiO3 grows heteroepitaxially on Si with the orientation relationship given by (001)STO//(001)Si and [100]STO//[110]Si. The lattice misfit between the SrTiO3 thin films and the Si substrate is accommodated by the presence of interfacial dislocations at the Si substrate side. The interface most likely consists of Si bonded to O in SrTiO3. The alternative presentation of Sr and Si atoms along the interface leads to the formation of 2× and 3× Sr configurations. Structural defects in the SrTiO3 thin film mainly consist of tilted domains and dislocations.
PY - 2002
SP - 204
EP - 213
T2 - Journal of Materials Research
TI - Study of microstructure in SrTiO3/Si by high-resolution transmission electron microscopy
VL - 17
SN - 08842914
ER -